Patent Assignment
Reel/Frame 041136/0197
Assignment of Assignor's Interest
Recorded: 2017-01-31
Pages: 2
Assignor
HALLER, KURT L.
Executed: 2017-01-30
Assignee
KLA-TENCOR CORPORATION
ONE TECHNOLOGY DRIVE, MILPITAS, CALIFORNIA, 95035
Covered Property
(1)
Activation Of Wafer Particle Defects For Spectroscopic Composition Analysis