Patent Assignment
Reel/Frame 041139/0219
Merger
Recorded: 2017-01-31
Pages: 5
Assignor
KLA-TENCOR TECHNOLOGIES CORPORATION
Executed: 2009-06-30
Assignee
KLA-TENCOR CORPORATION
ONE TECHNOLOGY DRIVE, MILPITAS, CALIFORNIA, 95035
Covered Property
(1)
Apparatus and Methods for Detecting Overlay Errors Using Scatterometry
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.