Patent Assignment
Reel/Frame 041141/0687
Assignment of Assignor's Interest
Recorded: 2016-12-21
Pages: 5
Assignors
CHANG, YANG-HUNG
Executed: 2016-12-14
SUN, CHE-YUAN
Executed: 2016-12-14
KE, CHIH-MING
Executed: 2016-12-14
HU, CHUN-MING
Executed: 2016-12-14
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
NO. 8, LI-HSIN RD 6, SCIENCE-BASED INDUSTRIAL PARK, HSIN-CHU, 300-77, TAIWAN
Covered Property
(1)
Forecasting Wafer Defects Using Frequency Domain Analysis