Patent Assignment
Reel/Frame 041146/0059
Assignment of Assignor's Interest
Recorded: 2017-02-01
Pages: 7
Assignors
KATO, HITOSHI
Executed: 2017-01-24
OHIZUMI, YUKIO
Executed: 2017-01-24
HONMA, MANABU
Executed: 2017-01-24
KOBAYASHI, TAKESHI
Executed: 2017-01-24
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Substrate Processing Apparatus