Patent Assignment
Reel/Frame 041161/0438
Assignment of Assignor's Interest
Recorded: 2017-02-02
Pages: 5
Assignor
YAMAGA, KENICHI
Executed: 2017-01-27
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Substrate Processing Apparatus, Substrate Processing Method and Storage Medium