Patent Assignment
Reel/Frame 041192/0565
Assignment of Assignor's Interest
Recorded: 2017-02-07
Pages: 6
Assignors
SAGEHASHI, MASAYOSHI
Executed: 2017-01-23
FUKUSHIMA, MASAHIRO
Executed: 2017-01-23
HASEGAWA, KOJI
Executed: 2017-01-23
ADACHI, TEPPEI
Executed: 2017-01-23
KATAYAMA, KAZUHIRO
Executed: 2017-01-23
HATAKEYAMA, JUN
Executed: 2017-01-23
Assignee
SHIN-ETSU CHEMICAL CO., LTD.
6-1, OHTEMACHI 2-CHOME, CHIYODA-KU, TOKYO, JAPAN
Covered Property
(1)
Monomer, Polymer, Resist Composition, and Patterning Process