Patent Assignment
Reel/Frame 041194/0337
Assignment of Assignor's Interest
Recorded: 2017-02-07
Pages: 10
Assignors
TAKAHASHI, HIROAKI
Executed: 2016-12-14
FUJIKAWA, KAZUNORI
Executed: 2016-12-21
KOJIMARU, TOMONORI
Executed: 2016-12-21
ISHIDA, TOMOMASA
Executed: 2016-12-14
HIGUCHI, AYUMI
Executed: 2016-12-14
FUJIWARA, NAOZUMI
Executed: 2016-12-14
KOMORI, KANA
Executed: 2016-12-21
IWAHATA, SHOTA
Executed: 2016-12-14
Assignee
SCREEN HOLDINGS CO., LTD.
TENJINKITA-MACHI 1-1, TERANOUCHI-AGARU 4-CHOME, HORIKAWA-DORI, KAMIGYO-KU, KYOTO-SHI, KYOTO, 602-8585, JAPAN
Covered Property
(1)
Substrate Processing Apparatus and Substrate Processing Method