Patent Assignment
Reel/Frame 041198/0896
Assignment of Assignor's Interest
Recorded: 2017-02-08
Pages: 6
Assignors
SWENBERG, JOHANES S.
Executed: 2017-01-25
WANG, LINLIN
Executed: 2017-01-24
LIU, WEI
Executed: 2017-01-25
Assignee
APPLIED MATERIALS, INC.
3050 BOWERS AVENUE, SANTA CLARA, CALIFORNIA, 95054
Covered Property
(1)
Fluorination During Ald High-K, Fluorination Post High-K and Use of a Post Fluorination Anneal to Engineer Fluorine Bonding and Incorporation