Patent Assignment
Reel/Frame 041203/0388
Assignment of Assignor's Interest
Recorded: 2017-02-08
Pages: 6
Assignors
KIM, MINSUNG
Executed: 2016-10-11
PARK, MYOUNG SOO
Executed: 2016-10-11
SUNG, DOUGYONG
Executed: 2016-10-11
JEON, YUN-KWANG
Executed: 2016-10-11
Assignee
SAMSUNG ELECTRONICS CO., LTD
129, SAMSUNG-RO, YEONGTONG-GU, SUWON-SI, GYEONGGI-DO, 16677, KOREA, REPUBLIC OF
Covered Property
(1)
Electrostatic Chucks and Substrate Processing Apparatus Including the Same