Patent Assignment
Reel/Frame 041213/0412
Assignment of Assignor's Interest
Recorded: 2017-02-09
Pages: 3
Assignor
OOHASHI, KAORU
Executed: 2014-06-23
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU,, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Plasma Processing Apparatus and Heater Temperature Control Method