Patent Assignment
Reel/Frame 041216/0133
Assignment of Assignor's Interest
Recorded: 2017-02-09
Pages: 4
Assignors
TAN, SAMANTHA
Executed: 2017-02-04
YANG, WENBING
Executed: 2017-02-03
KANARIK, KEREN JACOBS
Executed: 2017-02-07
LILL, THORSTEN
Executed: 2017-02-03
PAN, YANG
Executed: 2017-02-03
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Atomic Layer Etching 3D Structures: Si and Sige and Ge Smoothness on Horizontal and Vertical Surfaces