Patent Assignment
Reel/Frame 041221/0928
Assignment of Assignor's Interest
Recorded: 2017-02-10
Pages: 20
Assignors
MATEJKA, ULRICH
Executed: 2017-02-03
HUSEMANN, CHRISTOPH
Executed: 2017-02-03
RUOFF, JOHANNES
Executed: 2017-02-09
PERLITZ, SASCHA
Executed: 2017-02-02
MANN, HANS-JÜRGEN
Executed: 2017-02-03
Assignee
CARL ZEISS SMT GMBH
RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMANY
Covered Property
(1)
Method for Three-Dimensionally Measuring a 3D Aerial Image of a Lithography Mask