Patent Assignment
Reel/Frame 041234/0850
Assignment of Assignor's Interest
Recorded: 2017-02-13
Pages: 3
Assignor
YAEGASHI, HIDETAMI
Executed: 2017-02-09
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO 107-6325, JAPAN
Covered Property
(1)
Pattern Forming Method