Patent Assignment
Reel/Frame 041242/0919
Assignment of Assignor's Interest
Recorded: 2017-02-13
Pages: 10
Assignors
CHIMMALGI, ANANT
Executed: 2016-10-07
BRUNNER, RUDOLF
Executed: 2016-10-11
SHCHEMELININ, ANATOLY
Executed: 2016-10-10
BEZEL, ILYA
Executed: 2016-10-07
KIM, ERIK
Executed: 2016-10-13
PATIL, RAJEEV
Executed: 2016-10-20
Assignee
KLA-TENCOR CORPORATION
ONE TECHNOLOGY DRIVE, MILPITAS, CALIFORNIA, 95035
Covered Property
(1)
System and Method for Electrodeless Plasma Ignition in Laser-Sustained Plasma Light Source