Patent Assignment
Reel/Frame 041256/0399
Assignment of Assignor's Interest
Recorded: 2017-02-14
Pages: 6
Assignors
TAN, ZHONGKUI
Executed: 2017-01-30
ZHANG, YITANG
Executed: 2017-01-31
WU, YING
Executed: 2017-01-30
XU, QING
Executed: 2017-01-31
FU, QIAN
Executed: 2017-02-01
YAMAGUCHI, YOKO
Executed: 2017-02-01
CUI, LIN
Executed: 2017-01-31
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Atomic Layer Etching in Continuous Plasma