Patent Assignment
Reel/Frame 041258/0940
Assignment of Assignor's Interest
Recorded: 2017-02-15
Pages: 7
Assignors
LEE, CHANG-YUN
Executed: 2016-12-16
LEE, JU-HYUN
Executed: 2016-12-16
PARK, KEE-SOO
Executed: 2016-12-16
HAN, KYU-HEE
Executed: 2016-12-16
LEE, SEUNG-HUN
Executed: 2016-12-16
JEON, BYUNG-CHUL
Executed: 2016-12-16
Assignee
SAMSUNG ELECTRONICS CO., LTD
129, SAMSUNG-RO, YEONGTONG-GU, SUWON-SI, GYEONGGI-DO, 16677, KOREA, REPUBLIC OF
Covered Property
(1)
Deposition Process Monitoring System, and Method of Controlling Deposition Process and Method of Fabricating Semiconductor Device Using the System