Patent Assignment
Reel/Frame 041265/0160
Assignment of Assignor's Interest
Recorded: 2017-02-15
Pages: 3
Assignors
TAN, TAIDE
Executed: 2017-02-13
QIU, HUATAN
Executed: 2017-02-14
SENFF, RYAN
Executed: 2017-02-13
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Temperature Controlled Spacer For Use In A Substrate Processing Chamber