Patent Assignment
Reel/Frame 041266/0221
Assignment of Assignor's Interest
Recorded: 2017-02-15
Pages: 5
Assignors
TSAI, CHUN HSIUNG
Executed: 2017-02-02
YU, KUO-FENG
Executed: 2017-02-13
FAN, YUH-TA
Executed: 2017-02-03
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
NO. 8, LI-HSIN RD. 6, SCIENCE-BASED INDUSTRIAL PARK, HSIN-CHU, 300-77, TAIWAN
Covered Property
(1)
Plasma Enhanced Atomic Layer Deposition