Patent Assignment
Reel/Frame 041273/0419
Assignment of Assignor's Interest
Recorded: 2017-02-16
Pages: 4
Assignors
CHEN, SHU-HAN
Executed: 2017-02-08
LIN, SHENG-HUNG
Executed: 2017-02-08
HSU, HAN-HSUAN
Executed: 2017-02-08
LIN, CHIEN-FANG
Executed: 2017-02-08
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
NO. 8, LI-HSIN RD. 6, SCIENCE-BASED INDUSTRIAL PARK, HSINCHU, 300, TAIWAN
Covered Property
(1)
Method and System for Monitoring Temperature of Wafer