Patent Assignment
Reel/Frame 041275/0844
Assignment of Assignor's Interest
Recorded: 2017-02-16
Pages: 5
Assignors
HATAKEYAMA, JUN
Executed: 2017-01-31
ADACHI, TEPPEI
Executed: 2017-01-31
OHASHI, MASAKI
Executed: 2017-01-31
Assignee
SHIN-ETSU CHEMICAL CO., LTD.
6-1, OHTEMACHI 2-CHOME, CHIYODA-KU, TOKYO, JAPAN
Covered Property
(1)
Positive Resist Composition and Pattern Forming Process