Patent Assignment
Reel/Frame 041283/0146
Assignment of Assignor's Interest
Recorded: 2017-02-17
Pages: 8
Assignors
XU, MING
Executed: 2017-01-12
KOSHTI, SUSHANT S.
Executed: 2017-02-13
RICE, MICHAEL R.
Executed: 2017-01-13
BABAYAN, STEVEN E.
Executed: 2017-01-19
SUN, JENNIFER Y.
Executed: 2017-01-19
Assignee
APPLIED MATERIALS, INC.
3050 BOWERS AVENUE, SANTA CLARA, CALIFORNIA, 95054
Covered Property
(1)
Methods and Apparatus for Enhanced Flow Detection Repeatability of Thermal-Based Mass Flow Controllers (Mfcs)