Patent Assignment
Reel/Frame 041283/0870
Assignment of Assignor's Interest
Recorded: 2017-02-17
Pages: 4
Assignors
WANG, LAN-HAI
Executed: 2014-05-30
YANG, YONG-HUNG
Executed: 2014-05-30
LIU, DING-I
Executed: 2014-05-30
LIAO, SI-WEN
Executed: 2014-05-30
LEU, PO-HSIUNG
Executed: 2014-05-30
LIN, MAO-CHENG
Executed: 2014-05-30
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
NO. 8, LI-HSIN RD. 6, HSINCHU SCIENCE PARK, HSINCHU, 300-78, TAIWAN
Covered Property
(1)
Coating Apparatus and Method of Forming Coating Film