Patent Assignment
Reel/Frame 041317/0799
Assignment of Assignor's Interest
Recorded: 2017-02-21
Pages: 3
Assignor
SOLOWAN, HANS MICHAEL
Executed: 2017-02-14
Assignee
CARL ZEISS SMT GMBH
RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMANY
Covered Property
(1)
Method and Device for the Simulation of a Photolithographic Process for Generating a Wafer Structure