Patent Assignment
Reel/Frame 041318/0231
Assignment of Assignor's Interest
Recorded: 2017-02-21
Pages: 3
Assignee
TDK CORPORATION
3-9-1, SHIBAURA, MINATO-KU, TOKYO, 108-0023, JAPAN
Covered Property
(1)
Controlling Method for a Wafer Transportation Part and a Load Port Part on an Efem