Patent Assignment
Reel/Frame 041318/0763
Assignment of Assignor's Interest
Recorded: 2017-02-21
Pages: 6
Assignors
PETERS, JAN HENDRIK
Executed: 2017-02-02
BLUMRICH, JÖRG FREDERIK
Executed: 2017-02-01
SEIDEL, DIRK
Executed: 2017-02-01
Assignee
CARL ZEISS SMT GMBH
RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMANY
Covered Property
(1)
Method for Localizing Defects on Substrates
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.