Patent Assignment
Reel/Frame 041341/0508
Assignment of Assignor's Interest
Recorded: 2017-02-22
Pages: 4
Assignors
HAO, FANGLI
Executed: 2017-02-13
FU, YUEHONG
Executed: 2017-02-21
CHEN, ZHIGANG
Executed: 2017-02-13
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Helium Plug Design to Reduce Arcing