Patent Assignment
Reel/Frame 041354/0090
Assignment of Assignor's Interest
Recorded: 2017-02-23
Pages: 3
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO 107-6325, JAPAN
Covered Property
(1)
Substrate Processing Apparatus, Substrate Processing Method, and Storage Medium