Patent Assignment
Reel/Frame 041370/0847
Assignment of Assignor's Interest
Recorded: 2017-02-24
Pages: 3
Assignee
SHIBAURA MECHATRONICS CORPORATION
5-1, KASAMA 2-CHOME, SAKAE-KU, YOKOHAMA-SHI, KANAGAWA, 247-8610, JAPAN
Covered Property
(1)
Substrate Treatment Apparatus, Substrate Treatment Method, and Method for Manufacturing Substrate