Patent Assignment
Reel/Frame 041372/0228
Assignment of Assignor's Interest
Recorded: 2017-02-24
Pages: 3
Assignors
GOSHI, GENTARO
Executed: 2017-02-09
KIYOSE, HIROMI
Executed: 2017-02-09
BIWA, SATOSHI
Executed: 2017-02-11
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO 107-6325, JAPAN
Covered Property
(1)
Substrate Processing Apparatus, Substrate Processing Method, and Storage Medium