Patent Assignment
Reel/Frame 041384/0456
Assignment of Assignor's Interest
Recorded: 2017-02-27
Pages: 3
Assignors
INADOMI, HIROAKI
Executed: 2017-02-07
OKAMURA, SATOSHI
Executed: 2017-02-20
BIWA, SATOSHI
Executed: 2017-02-11
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO 107-6325, JAPAN
Covered Property
(1)
Substrate Processing Apparatus Having Cooling Member