Patent Assignment
Reel/Frame 041399/0885
Assignment of Assignor's Interest
Recorded: 2017-02-28
Pages: 5
Assignor
YAHATA, TAKASHI
Executed: 2017-02-17
Assignee
HITACHI KOKUSAI ELECTRIC INC.
15-12, NISHI-SHIMBASHI 2-CHOME, MINATO-KU, TOKYO, 105-8039, JAPAN
Covered Property
(1)
Substrate Processing Apparatus Capable of Adjusting Flow Rate of Inert Gas Supplied to Substrate
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.