Patent Assignment
Reel/Frame 041423/0891
Assignment of Assignor's Interest
Recorded: 2017-03-01
Pages: 6
Assignors
MARUYAMA, TORU
Executed: 2017-02-24
MATSUO, HISANORI
Executed: 2017-02-24
MOTOSHIMA, YASUYUKI
Executed: 2017-02-24
ETO, YOHEI
Executed: 2017-02-24
KOMATSU, MITSUNORI
Executed: 2017-02-24
Assignee
EBARA CORPORATION
11-1, HANEDA ASAHI-CHO, OHTA-KU, TOKYO, 144-8510, JAPAN
Covered Property
(1)
Apparatus and Method for Regulating Surface Temperature of Polishing Pad