Patent Assignment
Reel/Frame 041424/0706
Assignment of Assignor's Interest
Recorded: 2017-03-01
Pages: 4
Assignors
MUSSELMAN, MARCUS
Executed: 2017-02-23
BAILEY, ANDREW D., III
Executed: 2017-02-10
OPAITS, DMITRY
Executed: 2017-02-20
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Systems and Methods for Aligning Measurement Device in Substrate Processing Systems