Patent Assignment
Reel/Frame 041426/0259
Assignment of Assignor's Interest
Recorded: 2017-03-01
Pages: 5
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME, MINAOTI-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Mixed Gas Multiple Line Supply System and Substrate Processing Apparatus Using Same