Patent Assignment
Reel/Frame 041446/0765
Assignment of Assignor's Interest
Recorded: 2017-03-02
Pages: 4
Assignee
EBARA CORPORATION
11-1, HANEDA ASAHI-CHO, OHTA-KU, TOKYO, 144-8510, JAPAN
Covered Property
(1)
End Point Detection Method, Polishing Apparatus, and Polishing Method