Patent Assignment
Reel/Frame 041447/0515
Assignment of Assignor's Interest
Recorded: 2017-03-02
Pages: 8
Assignors
ORIHASHI, YUGO
Executed: 2017-02-20
YUASA, KAZUHIRO
Executed: 2017-02-20
MORIYA, ATSUSHI
Executed: 2017-02-23
NAKAISO, NAOHARU
Executed: 2017-02-20
Assignee
HITACHI KOKUSAI ELECTRIC INC.
15-12, NISHI-SHIMBASHI 2-CHOME, MINATO-KU, TOKYO, 105-8039, JAPAN
Covered Property
(1)
Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus, and Recording Medium
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.