Patent Assignment
Reel/Frame 041451/0250
Assignment of Assignor's Interest
Recorded: 2017-03-03
Pages: 3
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, AKASAKA BIZ TOWER, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Etching Method For A Structure Pattern Layer Having A First Material and Second Material