Patent Assignment
Reel/Frame 041461/0187
Assignment of Assignor's Interest
Recorded: 2017-03-03
Pages: 8
Assignor
RUOFF, JOHANNES
Executed: 2016-05-31
Assignee
CARL ZEISS SMT GMBH
RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMANY
Covered Property
(1)
Imaging Optical Unit for Euv Projection Lithography
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.