Patent Assignment
Reel/Frame 041478/0856
Assignment of Assignor's Interest
Recorded: 2017-03-06
Pages: 3
Assignors
DOLE, NIKHIL
Executed: 2017-03-03
HUDSON, ERIC A.
Executed: 2017-03-02
MATAMIS, GEORGE
Executed: 2017-03-03
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Technique to Tune Sidewall Passivation Deposition Conformality for High Aspect Ratio Cylinder Etch