Patent Assignment
Reel/Frame 041483/0832
Assignment of Assignor's Interest
Recorded: 2017-03-07
Pages: 4
Assignee
SHIN-ETSU CHEMICAL CO., LTD.
6-1, OHTEMACHI 2-CHOME, CHIYODA-KU, TOKYO, JAPAN
Covered Property
(1)
Method for Forming Organic Film and Method for Manufacturing Substrate for Semiconductor Apparatus