Patent Assignment
Reel/Frame 041500/0943
Assignment of Assignor's Interest
Recorded: 2017-03-08
Pages: 8
Assignors
HOSAKA, YUKI
Executed: 2017-01-25
UMEZAWA, YOSHIHIRO
Executed: 2017-01-26
NAKAJIMA, TOSHIKI
Executed: 2017-01-25
NAGAKURA, KOICHI
Executed: 2017-01-27
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Temperature Control Device for Processing Target Object and Method of Selectively Etching Nitride Film from Multilayer Film