Patent Assignment
Reel/Frame 041516/0829
Assignment of Assignor's Interest
Recorded: 2017-03-09
Pages: 3
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO-TO, JAPAN
Covered Property
(1)
Substrate Processing Method, Substrate Processing Apparatus and a Computer-Readable Storage Medium