Patent Assignment
Reel/Frame 041517/0336
Assignment of Assignor's Interest
Recorded: 2017-03-09
Pages: 3
Assignors
KOGA, NORIHISA
Executed: 2017-02-28
NISHIYAMA, TADASHI
Executed: 2017-02-28
NODA, YASUAKI
Executed: 2017-02-28
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO-TO, JAPAN
Covered Property
(1)
Substrate Imaging Apparatus