Patent Assignment
Reel/Frame 041532/0724
Assignment of Assignor's Interest
Recorded: 2017-03-09
Pages: 7
Assignors
LIU, HELEN
Executed: 2017-01-04
PATNAIK, ROHIT
Executed: 2017-01-04
OSBORNE, STEPHEN
Executed: 2017-01-04
Assignee
KLA-TENCOR CORPORATION
ONE TECHNOLOGY DRIVE, MILPITAS, CALIFORNIA, 95035
Covered Property
(1)
System and Method for Reconstructing High-Resolution Point Spread Functions from Low-Resolution Inspection Images