Patent Assignment
Reel/Frame 041559/0136
Assignment of Assignor's Interest
Recorded: 2017-03-13
Pages: 2
Assignor
IWAO, MICHINORI
Executed: 2017-02-21
Assignee
SCREEN HOLDINGS CO., LTD.
1-1, TENJINKITA-MACHI, TERANOUCHI-AGARU 4-CHOME, HORIKAWA-DORI, KAMIGYO-KU, KYOTO-SHI, KYOTO, 602-8585, JAPAN
Covered Property
(1)
Substrate Processing Device