Patent Assignment
Reel/Frame 041563/0011
Assignment of Assignor's Interest
Recorded: 2017-03-13
Pages: 4
Assignee
SUMITOMO HEAVY INDUSTRIES ION TECHNOLOGY CO., LTD.
1-1, OSAKI 2-CHOME, SHINAGAWA-KU, TOKYO, 141-6025, JAPAN
Covered Property
(1)
Ion Implantation Apparatus and Scanning Waveform Preparation Method