Patent Assignment
Reel/Frame 041577/0451
Assignment of Assignor's Interest
Recorded: 2017-03-15
Pages: 2
Assignor
KOIWA, SHINGO
Executed: 2017-01-06
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Processing Apparatus for Thermally Processing a Workpiece in a Chamber