Patent Assignment
Reel/Frame 041578/0260
Change of Name
Recorded: 2017-01-31
Pages: 2
Assignor
SAMSUNG AUSTIN SEMICONDUCTOR, L.P.
Executed: 2005-08-01
Assignee
SAMSUNG AUSTIN SEMICONDUCTOR, L.L.C.
12100 SAMSUNG BLVD., AUSTIN, TEXAS, 78754
Covered Property
(1)
Parallel Multi Wafer Axial Spin Clean Processing Using Spin Cassette Inside Movable Process Chamber