Patent Assignment
Reel/Frame 041586/0410
Assignment of Assignor's Interest
Recorded: 2017-03-15
Pages: 3
Assignor
TAPILY, KANDABARA N.
Executed: 2017-02-03
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Selective Film Formation for Raised and Recessed Features Using Deposition and Etching Processes