Patent Assignment
Reel/Frame 041598/0035
Assignment of Assignor's Interest
Recorded: 2017-03-16
Pages: 4
Assignors
CHEN, CHANG-YIN
Executed: 2014-09-16
CHENG, TUNG-WEN
Executed: 2014-09-16
CHANG, CHE-CHENG
Executed: 2014-09-16
LIN, JR-JUNG
Executed: 2014-09-16
LIN, CHIH-HAN
Executed: 2014-09-16
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
NO. 8, LI-HSIN RD. 6, SCIENCE-BASED INDUSTRIAL PARK, HSINCHU, 300, TAIWAN
Covered Property
(1)
Dry Etching Apparatus